DTU Danchip

Cleanroom History


Back in 1993, the foundation for what is now DTU Nanolab was laid, with the inauguration of a 560 m2 cleanroom facility. This facility was an integral part of the research vision at the ‘Mikroelektronik Centret’, later DTU Nanotech - Department of Micro- and Nanotechnology. 

The aim of the cleanroom facility was to establish the field of micro and nanotechnology in Denmark and built an industry around it.

In 2002, DTU initiated an expansion of the cleanroom facilities to the current 1350 m2 with an investment of more than 15 million Euro. An emerging microtechnology industry and a growing number of cleanroom users from DTU Nanotech and DTU Fotonik prompted a demand for more capacity and advanced equipment allowing to voyage deeper into the scope of nanotechnology. At the completion of the expansion in 2004, DTU Danchip was created with the main focus on operation and development of the cleanroom facilities.
In 2014 DTU Danchip was merged with DTU CEN the Center for Electron Nanoscopy. CEN was inaugurated in 2007 based on a generous grant from The A.P. Møller foundation. CEN was dedicated to state of the art e-beam based characterization allowing in situ observation of chemical reactions with atomic resolution, and state of the art material characterization (EELS, EDS, TKD etc).

In 2019 DTU Nanolab was created based on DTU Danchip and CEN together with the research groups from DTU Nanotech that where dedicated to cleanroom based technology research.
At this point DTU Nanolab is the national center for nanofabrication and characterization with more than 100 staff members, providing access to state of the art instruments and facilities, expertise, education, training, research and support to around 500 registered users from academia and industry, domestic and abroad.