The Thin Film Tool Package Training (TPT)

The thin film tool package training (TPT) course at DTU Nanolab consists of two lectures (5 hours in total). Each lecture will be held on two different days and approximately once a month. It is not recommended that you attend the 2nd lecture, before you have completed the 1st lecture.

The lectures provide an introduction to almost all thin film growth and deposition techniques that are being used in the cleanroom at DTU Nanolab. These include thermal oxidation, electroplating, PVD, CVD and ALD. Also different material properties relevant for thin films and information about vacuum are being explained in the course.

As the thin film TPT covers a very broad range of different thin film techniques, no practical part is included in the course.

Users that have to use any thin film growth and deposition tools in the cleanroom will have to attend the thin film TPT course. Users have to be signed up for the lectures, before one-to-one hands-on training sessions for any thin film equipment can be arranged.

Subjects for the 1st lecture (2 hours):

  • An introduction to thin films
  • Material properties
  • Overview of different thin film techniques at DTU Nanolab – 1st part:
    • Thermal oxidation
    • Electroplating

Subjects for the 2nd lecture (3 hours):

  • Vacuum basics
  • Overview of different thin film techniques at DTU Nanolab – 2nd part:
    • PVD (physical vapour deposition)
      • E-beam evaporation
      • Thermal evaporation
      • Sputtering
    • CVD (chemical vapour deposition)
      • LPCVD (low pressure chemical vapour deposition)
      • PECVD (plasma enhanced chemical vapour deposition)
    • ALD (atomic layer deposition)

Prerequisites

None

Cleanroom access is not required, but all thin film tools at DTU Nanolab are located in the cleanroom.

Preparations

None

More information about the thin film TPT is available on LabAdviser.
The slides from the lectures can also be found in LabAdviser.

How to get full authorization to the thin film equioment in the cleanroom

To be fully authorized to use a thin film equipment in the cleanroom, you will have to apply for a training session for each tool you want use by sending an email to training@nanolab.dtu.dk.

In order to apply for a training you should have signed up for the thin film TPT lectures, if you have not been attending these already.

How to sign up for the thin film TPT lectures

To sign up for the thin film TPT lectures, please write your name and email in these doodles: 1st lecture doodle, 2nd lecture doodle.
The dates for the coming lectures are also announced in the doodles.

Contact information

If you have questions or need more information about the thin film TPT course, please contact the Thin Film group at DTU Nanolab by sending an email to thinfilm@nanolab.dtu.dk

Dates & registration

 

Clik on the link in order to register and get an overview of the coming courses:

Sign up for The Thin Film TPT course 1st lecture

Sign up for The Thin Film TPT course Part 2nd lecture

 

Contact

Pernille Voss Larsen
Process Specialist, M.Sc.
DTU Nanolab
+45 45 25 59 03

Contact

Evgeniy Shkondin
Process specialist
DTU Nanolab
https://www.nanolab.dtu.dk/english/Education/Courses/The-Thin-Film-TPT
16 DECEMBER 2019