The dry etch tool package training (TPT)

The dry etch tool package training (TPT) at DTU Nanolab consists of some lecture videos, a question&evaluation session and a hands-on training session in the cleanroom. The lecture videos explains the dry etch processes (generation and characteristics of the etch plasma), introduces tuning an etch process and provides an overview of the dry etch equipment at Nanolab. According to the learning objectives for the full course the participant should afterwards be able to:

  • Know why and when to use dry etching
  • Use the dry etchers without harming the machines

  • Select the right instrument to use for his/her dry etch processing

  • Select an appropriate etch recipe for his/her dry etch processing

  • Spot when the recipe needs to be tuned for his/her needs and

  • Suggest relevant tuning parameters

The lecture videos are approximately 3 hours long, and must be viewed before the question&evaluation session. In the training session the participants will try out at least 2 different plasma etchers. We will group the participants into groups of up to three people and we expect the training session to last 2-3 hours.


Prerequisites


Safety course including chemical handling introduction.


Preparations

Before attending the Question&Evaluation session the participants must watch the ”Lecture videos”. These can be found on YouTube here

Before the hands-on training in the cleanroom the participants must watch the training videos for the ‘ASE/AOE’ software and for the ‘ICP metal/Pegasus/III-V ICP’ software. These can be found on YouTube here

An overview of the course and links to the Lecture slides can be found on LabAdviser. Be aware that this requires access to LabAdviser.


Course evaluation

The course evaluation with be part of the question&evaluation session and part of the hands-on training.


How to get full authorization on the dry etch equipment

To be fully authorized on any of the plasma etchers you need afterwards to get training on the particular instrument you want to use. Before the training you must read the relevant instrument manual and review the relevant training videos, so you are ready to show us that you can safely operate the instrument on your own.  

Full information on the dry etch TPT is available in LabAdviser along with links to training videos and the lecture videos and lecture slides incl. explanatory text.

To sign up for the dry etch TPT question&evaluation session, please go to the doodle: https://danchip.doodle.com/poll/awkny9e952arxbxm?utm_campaign=poll_added_participant_admin&utm_medium=email&utm_source=poll_transactional&utm_content=gotopoll-cta#table

 

Dates & registration

 

Clik on the link in order to register and get an overview of the coming courses:

Sign up for the Dry Etch TPT course 

 

 

Contact

Berit Herstrøm
Process Specialist, M.Sc.
DTU Nanolab
+45 45 25 63 03

Contact

Jonas Michael-Lindhard
Process Specialist, M.Sc.
DTU Nanolab
+45 45 25 57 44
https://www.nanolab.dtu.dk/english/Education/Courses/The-dry-etch-tool-package-training-TPT-
9 DECEMBER 2019