FEI Nova NANO SEM 600

The Nova NANO SEM 600 is a high-resolution scanning electron microscope equippend with SED, BSED and STEM detectors. In STEM mdoe, the resolution can be as low as 1 nanometre. The microscope can also work in low vacuum conditions and it is equipped with both electron backscatter diffraction (EBSD) detector for 2D crystallographic investigations and an energy dispersive X-ray spectrometer (EDS) for chemical characterization.

Adam

Helios

Electron source Field emission gun

Ion source Ga+ ions

Accelerating voltage 500 V - 30 kV

Resolution Better than 1.5 nm at 1 kV (SE)

Imaging detectors Everhart-Thornley (SE/BSE), Thru-the-Lens, Large Field, CCD Camera

Imaging modes Electron and ion beams at high vacuum

Analytical capabilities 2D and 3D EBSD (EDAX Hikari Camera, TSL EBSD Software Suite), EDS (EDAX SD Apollo 10 Pegasus System, resolution 131 eV)

Attachments Gas Injection Systems (GIS) for tungsten and platinum deposition, selective carbon etch and deliniating etch, in-situ Omniprobe micromnipulator and cryo can for minimizing contamination