FEI Inspect

The FEI Inspect S is the simplest microscope at DTU Nanolab and it is the first microscope to which new SEM users are introduced. The simplicity of its operation allows quick preliminary inspection of samples. On our FEI Inspect S it is possible to perform energy dispersive X-ray and wavelength dispersive measurements, as well as low vacuum investigations


Electron source
Thermionic - tungsten filament
Accelerating voltage
200 V- 30 kV
50 nm at 30 kV (SE)
Imaging detectors
Everhart-Thornley (SE/BSE), Solid state BSE, Large Field and CCD Camera
Imaging modes
High and low vacuum
Analytical Capabilities
Energy Dispersive X-ray Spectroscopy, EDS (Oxford Instruments 50 mm2 X-Max silicon drift detector, MnKα resolution at 124 eV), Oxford Instruments Wavelength Dispersive X-ray Spectroscopy (INCAWave 500, analysis for all elements down to boron, spectral resolution 2 eV).