Leif Steen Johansen

Leif Steen Johansen

Head of Operations, Ph.D.

DTU NANOLAB
DTU Nanolab - National Centre for Nano Fabrication and Characterization

Technical University of Denmark

Ørsteds Plads, Byg. 347

Building 347, room 170

2800 Lyngby

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2016
 

Quality control of JEOL JBX-9500FSZ e-beam lithography system in a multi-user laboratory

Greibe, Tine ; Anhøj, Thomas Aarøe ; Johansen, Leif ; Han, Anpan
in: Microelectronic Engineering, vol: 155, pages: 25-28

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2016     |    DOI: https://doi.org/10.1016/j.mee.2016.02.003

2000
 

Electroforming of 3D microstructures on highly structured surfaces

Johansen, Leif Steen ; Ginnerup, Morten ; Ravnkilde, Jan Tue ; Tang, Peter Torben ; Löchel, B.
in: Sensors and Actuators, A-physical, vol: 83, issue: 1-3, pages: 156-160

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2000


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9 DECEMBER 2019