Leif Steen Johansen

Leif Steen Johansen

Head of Operations, Ph.D.

DTU NANOLAB
DTU Nanolab - National Centre for Nano Fabrication and Characterization

Technical University of Denmark

Ørsteds Plads, Byg. 347

Building 347, room 170

2800 Lyngby

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2015
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Deep-UV-Lithography: Principles, Optimization, and Simulation

Keil, Matthias ; Møller, Niels Peder ; Khomtchenko, Elena ; Johansen, Leif Steen
part of: Book of Abstracts. DTU's Sustain Conference 2015, 2015, Technical University of Denmark, Lyngby
Presented at:
DTU Sustain Conference 2015

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    Year: 2015

2014
 

Electron Beam Lithography for nano-patterning

Greibe, Tine ; Anhøj, Thomas Aarøe ; Khomtchenko, Elena ; Michael-Lindhard, Jonas ; Johansen, Leif
part of: Abstract Book - DTU Sustain Conference 2014, 2014, Technical University of Denmark, Kgs. Lyngby
Presented at:
DTU Sustain Conference 2014

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    Year: 2014

 

Pattern Definition with DUV-Lithography at DTU Danchip

Keil, Matthias ; Khomtchenko, Elena ; Nyholt, Henrik ; Gregersen, Anders ; Johansen, Leif
part of: Abstract Book - DTU Sustain Conference 2014, 2014, Technical University of Denmark, Kgs. Lyngby
Presented at:
DTU Sustain Conference 2014

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    Year: 2014

1999
 

Electroplated Ni Comb accelerometers for CMOS post processing.

Johansen, Leif Steen ; Ravnkilde, Jan Tue ; Yalcinkaya, A.D. ; Hansen, Ole
part of: Electroplated Ni Comb accelerometers for CMOS post processing., pages: 409-410, 1999
Presented at:
13th European Conference on Solid-State Transducers

Type: Article in proceedings (Peer reviewed)

Status: Published     |    Year: 1999

 

Fabrication of electroplated 3D microstructures combining KOH etching, electrodeposition of photoresist, and selective etching.

Johansen, Leif Steen ; Ginnerup, Morten ; Tang, Peter Torben ; Ravnkilde, Jan Tue ; Löchel, B.
part of: Fabrication of electroplated 3D microstructures combining KOH etching, electrodeposition of photoresist, and selective etching., 1999, The Institute of Electrical Engineers of Japan
Presented at:
10th International Conference on Solid-State Sensors and Actuators (Transducers ’99)

Type: Article in proceedings (Peer reviewed)

Status: Published     |    Year: 1999

 

Fabrication of electroplated nickel micromechanical resonators.

Ravnkilde, Jan Tue ; Yalcinkaya, A.D. ; Johansen, Leif Steen ; Hansen, Ole
part of: Fabrication of electroplated nickel micromechanical resonators., 1999, Academic Press
Presented at:
196th Meeting of the Electrochemical Society

Type: Article in proceedings

Status: Published     |    Year: 1999


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9 DECEMBER 2019