Invited Speakers
Henri Jansen DTU Nanolab: Generic build-up of silicon plasma etch processes: a practical guide to directional profiles
Per-Erik Hellström, KTH: CMOS processing line for heterogenous integration at KTH
Analysis/Characterization
C1: X-ray Photoelectron Spectroscopy: a powerful characterization tool in material science and biotechnology, Hamid Khanmohammadi, NTNU BASIC
C2: FT-IR and Raman Spectroscopies: Principles and Applications, Philip M. Weiser, Oslo UiO BASIC
C3: Diffraction Techniques in the Scanning Electron Microscope (SEM), Alice Bastos S. Fanta, DTU Nanolab ADVANCED Part1 Part2
C4: Transmission Electron Microscopy (TEM): Combining analytical methods of imaging, diffraction, and spectroscopy, Lars Riekehr, Uppsala Ångström ADVANCED
C5: Intermodulation AFM: material properties at high speed and high resolution, Daniel Forchheimer, KTH ADVANCED
Thin Film technologies
T1: Thin film deposition tehcniques, Kristin Bergum, Oslo UiO BASIC
T2: Magnetron sputtering, Tomas Kubart, Uppsala Ångström ADVANCED
T3: Atomic Layer Deposition (ALD), Pernille V. Larsen & Evgeniy Shkondin, DTU Nanolab BASIC
T4: Epitaxial growth, Matthias Hammar, KTH BASIC
T5: From atoms to microfilms: a journey in thin film deposition technology, Ruggero Verre, Chalmers BASIC
Etching technologies
E1: Generic build-up of etch process: 3D-sculpturing by Si plasma etching, Bingdong Chang, DTU Nanolab ADVANCED
E2: Chemical Mechanical Polishing, Corrado Capriata, KTH BASIC
E3: Wet etching techniques, Karin Hedsten, Chalmers BASIC
E4: Atomic Layer Etching, Sabbir Ahmed Khan, KU/NBI BASIC
E5: Etching AlGaN alloys using ICP-RIE, Leidulv Vigen, NTNU BASIC
Lithography
L1: EBL hardware basics and craftsmanship, Marcus Rommel, Chalmers BASIC
L2: Electron beam lithography - process, principles, and capabilities, Jakob Vinje & Einar Digernes, NTNU BASIC
L3: Talbot displacement lithography, Mariusz Graczyk, Lund Nano Lab BASIC
L4: Block copolymer nanolithography, Anette Löfstrand, Lund Nano Lab BASIC
L5: Introduction to maskless UV-lithography, Lean Gottlieb Pedersen, DTU Nanolab BASIC