Conference

Conference contributions in 2008

J. Teva, G. Abadal, A. Uranga, J. Verd, F. Torres, J. L. Lopez, J. Esteve, F. Pérez-Murano, N.Barniol From VHF to UHF CMOS-MEMS monolithically integrated resonators. IEEE MEMS 2008 Conference, Tucson, Arizona, USA,  January 13-17, 2008, Technical Digest p. 82-85. PDF   

K. Reck, J. Richter, O. Hansen and E.V. Thomsen Peizoresistive effect in top-down fabricated silicon nanowires. IEEE MEMS 2008 Conference, Tucson, Arizona, USA,  January 13-17, 2008, Technical Digest p. 717-720.  

 

Conference contributions in 2007:

M. Tormen, R. Malureanu, A. Kristensen, and O. Hansen
Fast thermal nanoimprint lithography by a stamp with integrated heater
MNE 33rd International Conference on Micro- and Nano-Engineering, Copenhagen Denmark, 23-26 September 2007, Book of abstracts p. 117-118.

I. Fernández-Cuesta, X. Borrisé, A. Retolaza, S. Merino, D.-A. Mendels, O. Hansen, A.Kristensen and F. Pérez-Murano
Determination of stress build-up during NIL process in triangular polymer structures
MNE 33rd International Conference on Micro- and Nano-Engineering, Copenhagen Denmark, 23-26 September 2007, Book of abstracts p. 177-178.

D. H. Petersen, O. Hansen, T. M. Hansen, P. R. E. Petersen, and P. Bøggild
Static contact micro four-point probes with <11 nm positioning repeatability
MNE 33rd International Conference on Micro- and Nano-Engineering, Copenhagen Denmark, 23-26 September 2007, Book of abstracts p. 409-410.

S. Dohn, O. Hansen, and A. Boisen
Measurement of the resonant frequency of nano-scale cantilevers by hard contact readout
MNE 33rd International Conference on Micro- and Nano-Engineering, Copenhagen Denmark, 23-26 September 2007, Book of abstracts p. 463-464.

J. Richter, A. Hyldgård, K. Birkelund, M.B. Arnoldus, O. Hansen, and E. V. Thomsen
DETERMINATION OF PACKAGING INDUCED 3D STRESS UTILIZING A PIEZOCOEFFICIENT MAPPING DEVICE
IEEE MEMS-2007, 20th IEEE International Micro Electro Mechanical Systems (MEMS) Conference, Kobe, Japan, January 21-25 2007. Technical Digest ISBN 1-4244-0951-9 pp. 69-72.

J. Richter, A. Hyldgård, K. Birkelund, O. Hansen and E. V. Thomsen
REALTIME 3D STRESS MEASUREMENT IN CURING EPOXY PACKAGING
Transducers 07, Lyon June 10-14 (2007). Technical digest ISBN 1-4244-0841-5. pp 2083-2084.

J. Richter, M. B. Arnoldus, J. L. Hansen, A. N. Larsen, O. Hansen, and E. V. Thomsen
Piezoresistance in Strained Silicon and Strained Silicon Germanium
Group IV Semiconductor Nanostructures, Mater. Res. Soc. Symp. Proc. 958, paper no. 0958-L04-06, 2007, Warrendale, PA.

Conference contributions in 2006:

S. Jensen, S. Thorsteinsson, O. Hansen, U.J. Quaade
Microreactor for investigation of fast temperature cycling of catalytic reactions
5th International Conference on Unsteady-State Processes in Catalysts (USPC-5), Osaka, Japan, November 22-25, 2006, pp. 37-38

T. R. Henriksen, S. Jensen, U. Quaade, and O. Hansen
Optimization of the Temperature Distribution in a Chemical Microreactor Using a Multi-Segment Integrated Thin Film Heater
Proceedings of the 2006 Nordic COMSOL Conference, Copenhagen, Denmark, November 1-2, 2006, pp. 99-105 

S. Thorsteinsson, S. Jensen, U.J. Quaade, A.N. Larsen, J.L. Hansen, O. Hansen
Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure
Proceedings of the 20th European Conference on Solid-State Transducers, Eurosensors XX, Gothenburg, Sweden, September 17-20, 2006, paper #W2C-P3

S. Jensen, S. Thorsteinsson, O. Hansen, U. Quaade
Response surface modelling of rate enhancement during fast temperature cycling of catalytic reactions in microreactors
Book of Abstracts IMRET9, Berlin, Germany, September 6-8, 2006, pp. 132-133

J. J. Brandner, H. Hansen, O. Hansen, S. Jensen, L. Kiwi-Minsker, M. Luther, J. L. Olsen, U. J. Quaade, A. Renken, and K. Schubert
New Opportunities for Enhanced Microreactor Performance by Forced Thermal Oscillations
ACHEMA 2006, Frankfurt am Main, Germany, May 15 - 19, 2006, paper 1284 

R. Z. Sørensen, A. Klerke, U. Quaade, S. Jensen, O. Hansen, T. Johannessen, J. K. Nørskov, C. H. Christensen
Integrated Micro System for Controlled Delivery of Hydrogen from Metal Ammines
Proceedings of the 2006 AIChE Spring National Meeting, April 23–27, 2006, Orlando, FL, USA, paper 61e 

Conference contributions in 2005:

S. Thorsteinsson, S. Jensen, O. Younes-Metzler, U.J. Quaade, and O. Hansen
Integrated nickel disilicide thermometers for high-temperature applications
Proceedings of the 16th Micromechanics Europe Workshop (MME), Gothenburg, Sweden, September 4-6, 2005, pp.248-251

S. Jensen, J.L. Olsen, H. Hansen, O. Hansen, and U.J. Quaade
Microreactors with real-time gas detection for studies of catalytic reactions under forced thermal oscillations
Proceedings of the 7th European Congress on Catalysis (EuropaCat-VII), Sofia, Bulgaria, August 28 - September 1, 2005, paper P4-22

U. J. Quaade, S. Jensen, O. Hansen
Transient studies using silicon-fabricated microreactors with integrated capillary leaks
Proceedings of the 7th European Congress on Catalysis (EuropaCat-VII), Sofia, Bulgaria, August 28 - September 1, 2005, paper P4-32

U.J. Quaade, S. Jensen, and O. Hansen 
Fast gas sampling with integrated capillary leak on silicon fabricated microreactors  
Proceedings of the 19th North American Catalysis Society Meeting, Philadelphia, PA, USA, May 22-27, 2005 

S. Jensen, J.L. Olsen, H. Hansen, O. Hansen, and U.J. Quaade.

Reaction rate enhancement of catalytic CO oxidation under forced thermal oscillations in microreactors with real-time gas detection 
Proceedings of the 8th International Conference on Microreaction Technology (IMRET8), Atlanta, GA, USA, April 10-14, 2005, paper 134h 

S. Jensen, U.J. Quaade, and O. Hansen
High-Temperature Compatible Nickel Silicide Thermometer And Heater For Catalytic Chemical Microreactors 
Proceedings of the 18th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2005, Miami Beach, FL, USA, January 30-February 3, 2005, pp. 463-466 

Søren Jensen, Jonas M. Jensen, Ulrich J. Quaade, and Ole Hansen
Uniformity improving dummy structures for deep reactive ion etching (DRIE) processes  
Proceedings of SPIE vol. 5715, 2005, pp. 39-46 PDF

Conference contributions in 2004 and 2003:

U.J. Quaade, T. Johannessen, S. Jensen, and O. Hansen
Large concentration changes due to thermal diffusion in gas flow micro-systems with temperature gradients 
Proceedings of µTAS 2004, the 8th international Conference on Miniaturised Systems in Chemistry and Life Sciences, Malmö, Sweden, 26-30 September 2004, pp. 216-218 

U.J. Quaade, S. Thybo, S. Jensen, J. Johansen, T. Johannessen and O. Hansen
Photolithographic patterning of porous catalyst in microstructures 
Proceedings of the 6th European Congress on Catalysis (EuropaCat-VI), Innsbruck, Austria, August 31 - September 04, 2003, paper B2.159

https://www.nanolab.dtu.dk/english/research/silicon-microtechnology/publications/conference
16 DECEMBER 2019