Leif Steen Johansen

Leif Steen Johansen

Head of Operations, Ph.D.

DTU NANOLAB
DTU Nanolab - National Centre for Nano Fabrication and Characterization

Technical University of Denmark

Ørsteds Plads, Byg. 347

Building 347, room 170

2800 Lyngby

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1999
 

Fabrication of electroplated 3D microstructures combining KOH etching, electrodeposition of photoresist, and selective etching.

Johansen, Leif Steen ; Ginnerup, Morten ; Tang, Peter Torben ; Ravnkilde, Jan Tue ; Löchel, B.
part of: Fabrication of electroplated 3D microstructures combining KOH etching, electrodeposition of photoresist, and selective etching., 1999, The Institute of Electrical Engineers of Japan
Presented at:
10th International Conference on Solid-State Sensors and Actuators (Transducers ’99)

Type: Article in proceedings (Peer reviewed)

Status: Published     |    Year: 1999

 

Fabrication of electroplated nickel micromechanical resonators.

Ravnkilde, Jan Tue ; Yalcinkaya, A.D. ; Johansen, Leif Steen ; Hansen, Ole
part of: Fabrication of electroplated nickel micromechanical resonators., 1999, Academic Press
Presented at:
196th Meeting of the Electrochemical Society

Type: Article in proceedings

Status: Published     |    Year: 1999


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16 DECEMBER 2019