Leif Steen Johansen

Leif Steen Johansen

Head of Operations, Ph.D.

DTU NANOLAB
DTU Nanolab - National Centre for Nano Fabrication and Characterization

Technical University of Denmark

Ørsteds Plads, Byg. 347

Building 347, room 170

2800 Lyngby

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2016
 

Energy Saving on Cleanroom Fume Hoods

Jørgensen, Anders Michael ; Eriksen, Jan Vasland ; Becker, Majken ; Winther Allerup, Michael ; Johansen, Leif
Presented at:
Sustain-ATV Conference 2016

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2016

 

Quality control of JEOL JBX-9500FSZ e-beam lithography system in a multi-user laboratory

Greibe, Tine ; Anhøj, Thomas Aarøe ; Johansen, Leif ; Han, Anpan
in: Microelectronic Engineering, vol: 155, pages: 25-28

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2016     |    DOI: https://doi.org/10.1016/j.mee.2016.02.003

2015
  PDF

Deep-UV-Lithography: Principles, Optimization, and Simulation

Keil, Matthias ; Møller, Niels Peder ; Khomtchenko, Elena ; Johansen, Leif Steen
part of: Book of Abstracts. DTU's Sustain Conference 2015, 2015, Technical University of Denmark, Lyngby
Presented at:
DTU Sustain Conference 2015

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    Year: 2015

  PDF

Quality Control of JEOL JBX-9500 E-beam Lithography System in a Multi-User Laboratory

Greibe, Tine ; Anhøj, Thomas Aarøe ; Han, Anpan ; Johansen, Leif
Presented at:
41st International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2015

2014
  PDF

An Arduino-Based Hardware Lock and Sensor Data Collection System for Cleanroom Equipment

Johansen, Leif ; Nyholt, Henrik ; Hemmingsen, Jens H. ; Eskildsen, Thøger ; Hübner, Jörg
Presented at:
IEEE University Government Industry Micro/Nano Technology Symposium

Type: Sound/Visual production (digital)

Status: Published     |    Year: 2014

 

Electron Beam Lithography for nano-patterning

Greibe, Tine ; Anhøj, Thomas Aarøe ; Khomtchenko, Elena ; Michael-Lindhard, Jonas ; Johansen, Leif
part of: Abstract Book - DTU Sustain Conference 2014, 2014, Technical University of Denmark, Kgs. Lyngby
Presented at:
DTU Sustain Conference 2014

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    Year: 2014

 

Pattern Definition with DUV-Lithography at DTU Danchip

Keil, Matthias ; Khomtchenko, Elena ; Nyholt, Henrik ; Gregersen, Anders ; Johansen, Leif
part of: Abstract Book - DTU Sustain Conference 2014, 2014, Technical University of Denmark, Kgs. Lyngby
Presented at:
DTU Sustain Conference 2014

Type: Conference abstract in proceedings (Peer reviewed)

Status: Published     |    Year: 2014

2000
 

Electroforming of 3D microstructures on highly structured surfaces

Johansen, Leif Steen ; Ginnerup, Morten ; Ravnkilde, Jan Tue ; Tang, Peter Torben ; Löchel, B.
in: Sensors and Actuators, A-physical, vol: 83, issue: 1-3, pages: 156-160

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2000

 

Microelctronics for micromechanics

Johansen, Leif Steen

Type: Book (Peer reviewed)

Status: Published     |    Year: 2000

1999
 

Electroplated Ni Comb accelerometers for CMOS post processing.

Johansen, Leif Steen ; Ravnkilde, Jan Tue ; Yalcinkaya, A.D. ; Hansen, Ole
part of: Electroplated Ni Comb accelerometers for CMOS post processing., pages: 409-410, 1999
Presented at:
13th European Conference on Solid-State Transducers

Type: Article in proceedings (Peer reviewed)

Status: Published     |    Year: 1999


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16 DECEMBER 2019