Anna Elsukova

Anna Elsukova

Postdoc

DTU NANOLAB
DTU Nanolab - National Centre for Nano Fabrication and Characterization

Technical University of Denmark

Fysikvej

Building 307, room 126

2800 Kgs. Lyngby

Request a vCard via e-mail.

Publications
Activities
Courses
Loading

Publications rss feed

2018
  PDF

5-nm-lines in Organic Ice Resists

Elsukova, Anna ; Han, Anpan ; Beleggia, Marco
Presented at:
44th International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

  PDF

Color generation via electron beam irradiating organic ice

Zhao, Ding ; Tiddi, William ; Elsukova, Anna ; Beleggia, Marco ; Han, Anpan ; Qiu, Min
Presented at:
44th International conference on Micro and Nano Engineering

Type: Poster (Peer reviewed)

Status: Published     |    Year: 2018

 

Effect of Molecular Weight on the Feature Size in Organic Ice Resists

Elsukova, Anna ; Han, Anpan ; Zhao, Ding ; Beleggia, Marco
in: Nano letters, vol: 18, issue: 12, pages: 7576-7582

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2018     |    DOI: https://doi.org/10.1021/acs.nanolett.8b03130

  PDF

Electron-beam patterning organic ice resists

Elsukova, Anna ; Tiddi, William ; Han, Anpan ; Beleggia, Marco
Presented at:
The 62nd International Conference on Electron, Ion, and Proton Beam Technology and Nanofabrication

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

  PDF

Ice Resists for 3D Electron Beam Processing: Instruments in Denmark and China

Zhao, Ding ; Hong, Yu ; Tiddi, William ; Elsukova, Anna ; Beleggia, Marco ; Qiu, Min ; Han, Anpan
Presented at:
The 7th International Workshop on Focused Electron Beam-Induced Processing (FEBIP)

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

  PDF

Organic ice resist lithography with an environmental TEM

Elsukova, Anna ; Han, Anpan ; Beleggia, Marco
Presented at:
69th Annual Conference of the Nordic Microscopy Society

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

  PDF

Organic ice resists: effect of electron beam irradiation on frozen hydrocarbons

Elsukova, Anna ; Han, Anpan ; Beleggia, Marco
Presented at:
The 13th meeting of the “Ionizing Radiation and Polymers” symposium

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2018

 

Organic ice resists for 3D electron-beam processing: Instrumentation and operation

Tiddi, William ; Elsukova, Anna ; Beleggia, Marco ; Han, Anpan
in: Microelectronic Engineering, vol: 192, pages: 38-43

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2018     |    DOI: https://doi.org/10.1016/j.mee.2018.01.021

2017
 

Organic ice resists

Tiddi, William ; Elsukova, Anna ; Le, Hoa Thanh ; Liu, Pei ; Beleggia, Marco ; Han, Anpan
in: Nano letters, vol: 17, issue: 12, pages: 7886−7891

Type: Journal article (Peer reviewed)

Status: Published     |    Year: 2017     |    DOI: https://doi.org/10.1021/acs.nanolett.7b04190

  PDF

Organic ice resists: condensed small molecules as spin-free volatile E-beam resists

Tiddi, William ; Lê Thanh, Hoà ; Elsukova, Anna ; Beleggia, Marco ; Han, Anpan
Presented at:
43rd International conference on Micro and Nano Engineering

Type: Conference abstract for conference (Peer reviewed)

Status: Published     |    Year: 2017


Show all
https://www.nanolab.dtu.dk/english/service/phonebook/person?id=122284&tab=2&qt=dtupublicationquery
23 SEPTEMBER 2019