The dry etch tool package training (TPT) at DTU Nanolab consists of lecture videos, a lecture quiz/assignment, a question & evaluation session, and a hands-on training part that consists of a set of screencast videos and a hand-on session in the cleanroom. The lecture videos explain the dry etch processes (generation and characteristics of the etch plasma), introduces tuning an etch process and provides an overview of the dry etch equipment at Nanolab. According to the learning objectives for the full course, the participant should afterwards be able to:
- Know why and when to use dry etching
- Use the dry etchers without harming the machines
- Select the right instrument to use for his/her dry etch processing
- Select an appropriate etch recipe for his/her dry etch processing
- Spot when the recipe needs to be tuned for his/her needs
- Suggest relevant tuning parameters
The lecture videos are approximately 3 hours long, and must be watched before taking the quiz/assignment. After taking the quiz, the participant must sign up for a question & evaluation session. In the hands-on training session, the participants will try out at least two different plasma etchers. We will group the participants into groups of up to three people and we expect the hands-on training session to last about 2 hours.
Prerequisites
Safety course including chemical handling introduction. You also need to have a user account at DTU to be able to sign up for the course.
Course evaluation
The course evaluation with be an overall evaluation of the quiz result, the participation and contribution to the question & evaluation session, and part of the hands-on training.
Price
The price for the course is 2 x Nanolab support hours.
See the price per hour in the pricebook
An invoice will automatically be sent to your department / company.
How to get full authorization on the dry etch equipment
To be fully authorized on any of the plasma etchers you need afterwards to get training on the particular instrument you want to use. Before the final training, you must read the relevant instrument manual and review the relevant training videos, so you are ready to show us that you can safely operate the instrument on your own.
To sign up for the Dry Etch TPT please go to DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/home
Choose the menu “Discover” if you are not already there, search for “DTU Nanolab TPT: Dry Etch”. When you find the course, click on the course and press “Enrol in course”. When you are enroled in the course, you should be able to access the course when you are logged into DTU Learn.
When you are inside the course in DTU Learn then go to the menu “Course Content” and choose “Content”. In the menu to the left, you can click on “Dry Etch TPT” and you will see the content of the course. You need to go through it all in the right order.