To meet the challenges of high throughput, innovative device designs, cost-efficiency, and smaller form factors (under 5 nm), while accommodating the expanding use of semiconductor devices in daily life (IoT applications such as smart homes, medical sensors, and transportation), there's a need for adapted micro- and nanofabrication technologies.
A new Smart3D project, funded by Innovationsfonden and led by principal investigator Eugen Stamate, Senior Researcher at DTU Nanolab, leverages cutting-edge knowledge in 3D plasma-sheath-lens concepts and focuses on modal and discrete focusing effects.
Collaborating with DTU Nanolab, Polyteknik AS, and PragmatIC Semiconductor Ltd., the project's objective is to develop new nanofabrication equipment and enhance processes for thin film deposition, ion implantation, and etching on substrates up to 300 mm in diameter, addressing the evolving IoT landscape.
