dtu nanolab cleanroom duv stepper

We combine state-of-the-art equipment and expertise to enable groundbreaking research and development in the field of nanotechnology. Our facility offers comprehensive capabilities in fabrication and characterization, empowering researchers to design and create nanoscale structures with exceptional precision and control.

Our facility houses a specially designed cleanroom, providing an environment with stringent contamination control to ensure the utmost quality and reliability of fabricated devices. Equipped with advanced infrastructure and advanced process control systems, our cleanroom creates an ideal setting for nanofabrication activities. 

We offer a diverse range of nanofabrication techniques to realize custom-designed structures and devices. Our capabilities include lithography, etching, deposition, and assembly processes. With lithography, we achieve high-resolution patterning to create intricate patterns and features. Etching enables precise shaping and modification of materials, while deposition techniques facilitate the controlled growth of thin films and layers. Additionally, our expertise extends to assembly processes, allowing for the integration of various components into functional nanoscale devices. 

Understanding and analyzing the properties of nanoscale structures is crucial for evaluating their performance and functionality. Our facility is equipped with advanced characterization tools to provide in-depth analysis of fabricated samples. We offer a range of techniques such as microscopy, spectroscopy, and surface analysis, enabling researchers to explore the structural, optical, electrical, and chemical properties of their nanofabricated devices.