Focused ion beam deposition and machining

About our Research

Dual-beam FIB-SEM instruments are ideal for preparation of thin TEM-lamella from bulk materials ready for TEM inspection. They also allow for controlled deposition of different materials, and transfer of micro-scale devices between different platforms. When combined with techniques such as electron backscatter diffraction (EBSD) and energy dispersive X-ray spectroscopy (EDX), 3D crystallographic investigations and 3D chemical characterization can be carried out.

We house two dual-beam SEM-FIBs at DTU Nanolab:

  • Helios NanoLAB 600
  • Helios 5 Hydra

Both instruments are fitted with field emission electron guns (FEG). Helios Nanolab 600 has a liquid metal ion source (LMIS) Ga ion beam and Helios 5 Hydra is a multi-ion-species plasma FIB.

Have a look at our introduction to Hydra:

What is Hydra