Materials

metals

Aluminium, Chromium, Cobalt, Copper, Gold, Iron, Magnesium, Molybdenum, Nickel, Niobium, Palladium, Platinum, Ruthenium, Silver, Tantalum, Tin, Titanium, Tungsten, and Zinc.

oxides

Aluminium Oxide (Al2O3),Barium titanate (BaTiO3), Chromium Oxide (Cr2O3), Hafnium Oxide (HfO2), Magnesium Oxide (MgO), Nickel Oxide (NiO), Silicon Oxide (SiO2), Titanium Oxide (TiO2),Tantalum Oxide (Ta2O5), Vanadium Oxide (VOx), and Zinc Oxide (ZnO).

alloys

AlCu, CoFe, CuTi, FeMn, MnIr, NbTi, NiCo, NiFe, NiV alloy, TiW alloy (10%/90% by weight), and YSZ (Yttrium stabilized zirconia).

nitrides

Silicon Nitride - and oxynitride
Titanium Nitride
Aluminum Nitride (AlxNy)

Transparent conducting oxides (TCO)

ITO (Indium Tin Oxide)
AZO (Aluminum doped Zinc Oxide)

Polymers

SU-8
Antistiction coating
COC (Topas)
PMMA