Materials
metals
Aluminium, Chromium, Cobalt, Copper, Gold, Iron, Magnesium, Molybdenum, Nickel, Niobium, Palladium, Platinum, Ruthenium, Silver, Tantalum, Tin, Titanium, Tungsten, and Zinc.
oxides
Aluminium Oxide (Al2O3),Barium titanate (BaTiO3), Chromium Oxide (Cr2O3), Hafnium Oxide (HfO2), Magnesium Oxide (MgO), Nickel Oxide (NiO), Silicon Oxide (SiO2), Titanium Oxide (TiO2),Tantalum Oxide (Ta2O5), Vanadium Oxide (VOx), and Zinc Oxide (ZnO).
alloys
AlCu, CoFe, CuTi, FeMn, MnIr, NbTi, NiCo, NiFe, NiV alloy, TiW alloy (10%/90% by weight), and YSZ (Yttrium stabilized zirconia).
nitrides
Silicon Nitride - and oxynitride
Titanium Nitride
Aluminum Nitride (AlxNy)
Transparent conducting oxides (TCO)
ITO (Indium Tin Oxide)
AZO (Aluminum doped Zinc Oxide)
Polymers
SU-8
Antistiction coating
COC (Topas)
PMMA