Lithography training package
The lithography tool training consists of online lecture videos, online reading material, and online tests. The course assessment will be an evaluation of the test result. Each individual test has to be answered ≥90% correct, in order to pass the course.
Training Course
You are required to pass this course, in order to get access to the lithography equipment inside the DTU Nanolab fabrication facility (the cleanroom).The lithography training covers:
- UV lithography theory
- Physics
- Chemistry
- Hardware
- Process steps
- Process parameters
- Physics
- Chemistry
- Hardware
- Process steps
- Process parameters
Prerequisites
You need to have a user account at DTU, to be able to sign up for the Lithography training course. Also, you must be a user of the DTU Nanolab fabrication facility before you can get access to the cleanroom.
Price
The price for the course is 2 x Nanolab support hours (see the price per hour in the price list. The invoice will automatically be sent to your department or company.
How to get full authorization on the lithography equipment
When all training tests have been completed successfully, you have finished the training, and can begin the online training on lithography equipment. After completing the online equipment training, you become eligible for the hands-on authorization training, which will take place inside the cleanroom.
To get full authorization on any lithography equipment, you must complete the Lithography Training, complete the online equipment training for the specific tool(s) you need acces to, and complete the hands-on authorization training in the cleanroom.
Sign up for the Lithography training
You can sign up for the course beneath.Remember, it is necessary to have a user account at DTU, to be able to sign up for the Lithography training course. Also, you must be a user of the DTU Nanolab fabrication facility before you can get access to the cleanroom.
You need to have a user account at DTU, to be able to sign up for the Lithography training course. Also, you must be a user of the DTU Nanolab fabrication facility before you can get access to the cleanroom.
Price
The price for the course is 2 x Nanolab support hours (see the price per hour in the price list. The invoice will automatically be sent to your department or company.
How to get full authorization on the lithography equipment
When all training tests have been completed successfully, you have finished the training, and can begin the online training on lithography equipment. After completing the online equipment training, you become eligible for the hands-on authorization training, which will take place inside the cleanroom.
To get full authorization on any lithography equipment, you must complete the Lithography Training, complete the online equipment training for the specific tool(s) you need acces to, and complete the hands-on authorization training in the cleanroom.
Sign up for the Lithography training
You can sign up for the course beneath.Remember, it is necessary to have a user account at DTU, to be able to sign up for the Lithography training course. Also, you must be a user of the DTU Nanolab fabrication facility before you can get access to the cleanroom.
Contact
Jens Hindborg Hemmingsen Process Specialist, M.Sc.