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DTU Nanolab

National Centre for Nano Fabrication and Characterization

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  1. DTU Nanolab
  2. Access
  3. Access to cleanroom facilities
  4. Equipment training packages
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  • Safety introduction course
  • Safety introduction (3 week students)
  • Equipment training packages
    • Scanning electron microscopy training
    • Lithography training
    • Dry etch tool training
    • Thin film tool training
    • Other cleanroom equipment

Equipment training packages

Equipment training is a bundle of theory and specific bundles of tool training. The packages give a solid start to the specific area and is mandatory before using the specific equipment. Do note that you must have access to the facilities where the tools are located before you can finish the additional equipment training.

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SEM Training package

For all new Scanning Electron Microscopy (SEM) users at DTU Nanolab, it is mandatory to attend a SEM Tool Training course. The SEM course consists of a lecture and one or more practical  training sessions.

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dry etch training package

The dry etch tool training consists of lecture videos, a lecture quiz/assignment, a question & evaluation session, and practical training part which consists of a set of screencast videos and a practical session in the cleanroom. 

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Thin film training package

The thin film tool training course consists of two lectures (5 hours in total). Each lecture will be held on two different days and approx. once a month. It is not recommended that you attend the 2nd lecture, before you complete the 1st.

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lithography training package

The lithography tool training consists of online lecture videos, online reading material, and online quizzes. You are required to pass this course, in order to get access to the lithography equipment inside the fabrication facility (cleanroom).

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Sign up for other cleanroom equipment training

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Contact Fabrication Support

Subpages

  • Scanning electron microscopy training
  • Lithography training
  • Dry etch tool training
  • Thin film tool training
  • Other cleanroom equipment

DTU Nanolab

National Centre for Nano Fabrication and Characterization

Address

Oersteds Plads - Building 347
2800 Kongens Lyngby
Denmark

Tel. +45 4525 5743
Email info@nanolab.dtu.dk

CVR number: 30 06 09 46
EAN number: 5798 000 430 563

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