Scanning electron microscopy (SEM)

DTU Nanolab has a number of Scanning Electron Microscopes (SEM) for different applications. The SEMs are mainly located in building 314 and 346.

All new SEM users at DTU Nanolab must attend a SEM Tool Training Package. The SEM Training Package consists of a lecture and one or more practical training sessions. The lecture takes just over 3 hours and is held during 3-week periods and once or twice a semester depending on demand. You sign up for the lectures on the DTU Learn site for the SEM Tool Training course, where it is also possible to watch some videos of the lecture instead of attending in person.

Further Information about the Training Course

The SEMs in building 314 are general access instruments for users with a wide range of backgrounds, from materials science to biology. You can find more information about the capabilities of the SEMs in building 314 here. The SEMs in building 346 are dedicated to users of Nanolab’s microfabrication facilities in building 346, 347, and 451, including cleanroom users. Additionally, we provide training for a SEM in building 375 at DTU offshore and we have a small tabletop SEM in building 451. If you are uncertain about where you belong, please complete the Access Request Form.

Learning objectives
Upon completion of the lecture, participants should be able to:

- Explain SEM electron optics and detectors
- Understand the possibilities and limitations of SEM
- Optimize SEM images
- Determine the next steps, including which tool to use and how to receive further training

Prerequisites
None

Preparations
Before the lecture, all participants must read a scanning electron microscopy primer and some related notes. This material can accessed when you sign up for the course.

Lecture
The lecture is divided into two parts. The first part provides an introduction to SEM theory, covering electron optics and image formation. The second part presents practical details about the SEMs at DTU Nanolab, including a description of different detectors and some sample preparation and mounting methods.

Practical training
After the lecture, practical SEM trainings are scheduled. In building 314 you will have one or more individual sessions, which will be arranged after your initial startup meeting. In Building 346, practical training is divided into two parts: first, a group training session, followed by one or more individual training sessions, usually at the Zeiss SEM Supra 1 located outside the cleanroom.

Price
The price for the course is equivalent to 2 x Nanolab support hours (the price can be found in the price list). The invoice will be automatically sent to your department or company.

Further information
Comprehensive information about the SEM Tool Package Training is available on LabAdviser, including preparation materials and lecture slides. Access to LabAdviser will be granted when you register as a user at DTU Nanolab. The preparation materials and slides are also accessible when you sign up for the course using the link provided above.