Thin film tool training package
The thin film training course consists of two lectures (~ 5 hours in total). Each lecture will be held on two different days, approximately once a month.
The two lectures provide an introduction to thin film growth and deposition techniques used in the cleanroom at DTU Nanolab. These techniques include thermal oxidation, PVD, CVD, and ALD. Additionally, vacuum and various material properties relevant to thin films are explained during the lectures.
Training Course
As the lectures cover a very broad range of different thin film techniques, no practical trainings are included in the course.
Users who have to use any thin film growth and deposition tools in the cleanroom will have to attend the thin film training course. Users must sign up for the lectures, before one-to-one hands-on training sessions for any thin film equipment can be arranged.
Subjects for the 1st lecture (~ 2 hours)
- Introduction to thin films
‣ Thin film formation
‣ Material properties
‣ Overview of the techniques
‣ LabAdviser
- PVD (Physical Vapour Deposition)
‣ General notes on PVD
‣ Resistive thermal evaporation
‣ E-beam evaporation
‣ Sputtering
Subjects for the 2nd lecture (~ 3 hours)
- Thermal Oxidation
- CVD (Chemical Vapour Deposition):
‣ LPCVD (Low Pressure Chemical Vapour Deposition)
‣ PECVD (Plasma Enhanced Chemical Vapour Deposition)
- ALD (Atomic Layer Deposition)
‣ Thermal ALD
‣ Plasma Enhanced ALD
- Comparison of thin film techniques
Prerequisites
None. Cleanroom access is not required, but all thin film tools at DTU Nanolab are located in the cleanroom.
Preparations
There are no specific preparations required before attending the training course or lectures. More information about the thin film training course is available on LabAdviser. A LabManager link to the slides from the lectures can also be found in LabAdviser.
How to get full authorization to the thin film equipment in the cleanroom
To be fully authorized to use thin film equipment in the cleanroom, you will have to apply for a training session for each tool you want use by sending an email to Training Support. In order to apply for a training, you must have signed up for the thin film training course lectures, if you have not attended these already.
Sign up for the thin film training
Use the link on this page. In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”.
The dates for the coming lectures are also announced in DTU Learn.
Price
The price for the course is 2 x Nanolab support hours (see the price per hour in the price book). The invoice will automatically be sent to your department or company.
