Mask aligner

Karl Süss MA6 is a standard mask aligner allowing topside and backside alignment, flood exposure as well as bond alignment. The resolution is typically around 1.5µm. A 500W Hg-Xe lamp provides 11mW/cm2 @365nm (notch filter),350nm optics are optional. Substrate size ranges from small samples (10mm x 10mm) to 150mm wafers.