Mask less aligners (MLA)
DTU Nanolab features 3 maskless aligners all from Heidelberg Instruments.
MLA01 (MLA 100) is a standard MLA uses projection of 365nm LED light and has a maximum resolution of 1µm. Basic grayscale exposure is possible. Substrate sizes are from small pieces up to 150mm. Writing speed is specified to around 50mm2/min.
MLA02 is a versatile tool allowing for a high quality mode (down to 0.6µm line width) and featuring 375nm as well as 405nm Laser Diode Array. It also allows back side alignment. Writing speed is specified to 285mm2/min in fast mode and 140mm2/min in high quality mode.
Substrate size ranges from small pieces to 200mm wafers.
MLA03 is optimized for high speed, features a 405nm Laser Diode Array and allows for backside alignment. Resolution is around 1µm. The writing speed is 1100mm2/min in fast mode and 440mm2/min in high quality mode.
Substrate size ranges from small pieces up to 150mm wafers.
MLA01 (MLA 100) is a standard MLA uses projection of 365nm LED light and has a maximum resolution of 1µm. Basic grayscale exposure is possible. Substrate sizes are from small pieces up to 150mm. Writing speed is specified to around 50mm2/min.
MLA02 is a versatile tool allowing for a high quality mode (down to 0.6µm line width) and featuring 375nm as well as 405nm Laser Diode Array. It also allows back side alignment. Writing speed is specified to 285mm2/min in fast mode and 140mm2/min in high quality mode.
Substrate size ranges from small pieces to 200mm wafers.
MLA03 is optimized for high speed, features a 405nm Laser Diode Array and allows for backside alignment. Resolution is around 1µm. The writing speed is 1100mm2/min in fast mode and 440mm2/min in high quality mode.
Substrate size ranges from small pieces up to 150mm wafers.
